Title:          Micro electric-field sensor based on converse piezoelectric effect
Subject:        22nd International Symposium on High Voltage Engineering (ISH 2021)
Keywords:       Electric-field measurement, micro-fabrication, piezoelectric film, piezoresistive effect
Author:         Mingyong Xin1, Changbao Xu1, Jianyang Zhu1, Peng Li2, Bing Tian2, Zhong Liu2, Zhifei Han2*
Creator:        Microsoft Word 2010
Producer:       Zotero (Acrobat Distiller 22.0 (Windows); modified using iText 7.1.1 2000-2018 iText Group NV (AGPL-version))
CreationDate:   Tue Apr 12 14:36:45 2022
ModDate:        Sun May  5 12:46:11 2024
Tagged:         no
Form:           none
Pages:          5
Encrypted:      no
Page size:      595.32 x 841.92 pts (A4) (rotated 0 degrees)
File size:      222324 bytes
Optimized:      no
PDF version:    1.7
